Glossary
This glossary describes some of the acronyms and jargon used by
the Microsystems Technology Laboratories. This guide is provided
for your reference. If you have any suggestions, please send us feedback.
Other Links of Interest
- 6.152j
- EECS course "Microelectronic Processing Technology." Prerequisite
for using the Microsystems Technology Laboratories' fabrication
facilities. | link
- Admin
- Shorthand for "administrative assistant."
- AO
- Administrative Officer
- Booties
- Shoe covers.
- Bunnysuits
- White suits worn in cleanrooms. Also known as cleanroom suits
and cleanroom gowns.
- CAD
- Computer-Aided Design
- CAFE
- Computer Aided Fabrication Environment. No longer used at MTL.
See CORAL
- ChemE
- Department of Chemical Engineering | link
- CHP
- Chemical Hygiene Plan
- CICS
- Center for Integrated Circuits and Systems | link
- CIM
- Computer Integrated Manufacturing
- CMOS
- Complementary Metal Oxide Semiconductor
- CMP
- Chemical-Mechanical Polishing
- CORAL
- Common Object Representation for Advanced Laboratories. Suite
of software tools designed to help with the management and operation
of MTL. | link
- DACCA
- Consolidated Salary Expense Analysis (a monthly payroll report)
- DICS
- Digital Integrated Circuits and Systems
- DLC
- Departments, Labs, and Centers
- DMSE
- Department of Materials Science and Engineering | link
- DOT
- Department of Transportation
- EDA
- Electronic Design Automation
- EECS
- Department of Electrical Engineering and Computer Science | link
- EHS
- Environmental Health & Safety [Office]. Overseers of safety
policy at MIT. Also known as EH&S. | link
- EML
- Exploratory Materials Laboratory. Located on fifth floor of Building
39. Broad range of devices fabricated here.
- EPA
- Environmental Protection Agency
- ERT
- Emergency Response Team
- Fab
- Shorthand term for Fabrication Facilities.
- FFA
- Fabrication Facilities Access
- FO
- Fiscal Officer | link
- HF
- Hydrofluoric Acid
- IAB
- Industrial Advisory Board | link
- ICL
- Integrated Circuits Laboratory. Located on second floor of Building
39. Class 10 cleanroom. CMOS and CMOS-compatible devices fabricated
here.
- ITRC
- Intelligent Transportation Research Center | link
- Identicard
- Thin plastic card with magnetic stripe. These cards are used
for access to lab and other restricted areas. | link
- Identicard form
- Form used for requesting and updating a user's lab/restricted
area access.
- JV
- Journal voucher
- Machine Charge Chart
- Matrix detailing what the usage rates are for MTL equipment.
| link
- MechE
- Department of Mechanical Engineering | link
- MEMS
- Micro-electro Mechanical Systems
- MEMS@MIT
- MEMS@MIT is a research group focusing on (what else?) MEMS. |
link
- MOSFET
- Metal Oxide Semiconductor Field-Effect Transistor
- µAMPS
- Micro-Adaptive Multi-domain Power-aware Sensors
- MIG
- Microsystems Industrial Group | link
- MIT
- Massachusetts Institute of Technology | link
- MSD
- Materials, Structures and Devices Focus Center
- MSDS
- Material Safety Data Sheets
- MTL
- Microsystems Technology Laboratories
- MUMMS
- MTL User Machine Management System
- MyMTL
- Obsolete; see MUMMS
- NFPA
- National Fire Protection Association
- OSHA
- Occupational Safety and Health Administration
- PI
- Principal Investigator
- Process Flow Matrix
- Matrix made by the PTC to illustrate MTL machine capabilities.
| link
- Process Unit
- Measurement used within MTL to determine cost of machine
usage and process variables.
- PTC
- Process Technology Committee
- Remote CORAL
- ---------
- RGL
- Research Group Laboratories
- Safety Diamond
- Symbol used by the NFPA to classify various hazard ratings. The
diamond is broken into four sections. Numbers in the three colored
sections range from 0 (least severe hazard) to 4 (most severe hazard).
The fourth (white) section is left blank and is used only to denote
special fire fighting measures/hazards. also known as the NFPA
Safety Diamond
- Si
- Symbol for the element silicon
- SOE
- School of Engineering. Also abbreviated as SoE. | link
- SOI
- Silicon-on-Insulator
- SOP
- Standard Operating Procedure
- SPR
- Semiconductor Process Representation
- TCAD
- Technology Computer-Aided Design
- TNA
- Training Needs Assessment
- TRL
- Technology Research Laboratories. Located on fourth floor of
Building 39. Class 100 cleanroom. CMOS-compatible, optoelectronic,
MEMS devices fabricated here.
- User
- Commonly meant to refer to those using MTL's fabrication facilities.
- UWB
- Ultra Wide Band
- VLSI
- Very-Large-Scale Integration
- VLSI Seminars
- Obsolete name; now known as MTL Seminar Series. Semi-weekly seminar series held in the spring and fall, hosted
by MTL. | link
- Wafer
- A small thin circular slice of a semiconducting material, such
as pure silicon or quartz, on which an integrated circuit can be
formed.
- Web Member
- Term given to those with an account to access various features
of MTL website on the internet. Examples include Remote CORAL use
and MIG Members Only use as well as MyMTL accounts. | link
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