Glossary

This glossary describes some of the acronyms and jargon used by the Microsystems Technology Laboratories. This guide is provided for your reference. If you have any suggestions, please send us feedback.

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6.152j
EECS course "Microelectronic Processing Technology." Prerequisite for Using the Microsystems Technology Laboratories' fabrication facilities. | link
Admin
Shorthand for "administrative assistant."
AO
Administrative Officer
Booties
Shoe covers.
Bunnysuits
White suits worn in cleanrooms. Also known as cleanroom suits and cleanroom gowns.
CAD
Computer-Aided Design
CAFE
Computer Aided Fabrication Environment. No longer used at MTL. See CORAL
ChemE
Department of Chemical Engineering | link
CHP
Chemical Hygiene Plan
CICS
Center for Integrated Circuits and Systems | link
CIM
Computer Integrated Manufacturing
CMOS
Complementary Metal Oxide Semiconductor
CMP
Chemical-Mechanical Polishing
CORAL
Common Object Representation for Advanced Laboratories. Suite of software tools designed to help with the management and operation of MTL. | link
DACCA
Consolidated Salary Expense Analysis (a monthly payroll report)
DICS
Digital Integrated Circuits and Systems
DLC
Departments, Labs, and Centers
DMSE
Department of Materials Science and Engineering | link
DOT
Department of Transportation
EBL
Electron Beam Lithography Laboratory
EDA
Electronic Design Automation
EECS
Department of Electrical Engineering and Computer Science | link
EHS
Environmental Health & Safety [Office]. Overseers of safety policy at MIT. Also known as EH&S. | link
EML
Exploratory Materials Laboratory. Located on fifth floor of Building 39. Broad range of devices fabricated here.
EPA
Environmental Protection Agency
ERT
Emergency Response Team | link
Fab
Shorthand term for Fabrication Facilities.
FFA
Fabrication Facilities Access | link
FO
Fiscal Officer | link
HF
Hydrofluoric Acid
IAB
Industrial Advisory Board | link
ICL
Integrated Circuits Laboratory. Located on second floor of Building 39. Class 10 cleanroom. CMOS and CMOS-compatible devices fabricated here.
ITRC
Intelligent Transportation Research Center | link
Identicard
Thin plastic card with magnetic stripe. These cards are used for access to lab and other restricted areas. | link
Identicard form
Form used for requesting and updating a user's lab/restricted area access.
JV
Journal voucher
Machine Charge Chart
Matrix detailing what the usage rates are for MTL equipment. | link
MechE
Department of Mechanical Engineering | link
MEMS
Micro-electro Mechanical Systems
MEMS@MIT
MEMS@MIT is a research group focUsing on (what else?) MEMS. | link
MOSFET
Metal Oxide Semiconductor Field-Effect Transistor
µAMPS
Micro-Adaptive Multi-domain Power-aware Sensors
MIG
Microsystems Industrial Group | link
MIT
Massachusetts Institute of Technology | link
MSD
Materials, Structures and Devices Focus Center
MSDS
Material Safety Data Sheets
MTL
Microsystems Technology Laboratories
MUMMS
MTL User Machine Management System
MyMTL
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NFPA
National Fire Protection Association
OSHA
Occupational Safety and Health Administration
PI
Principal Investigator
Process Flow Matrix
Matrix made by the PTC to illustrate MTL machine capabilities. | link
Process Unit
Measurement used within MTL to determine cost of machine usage and process variables.
PTC
Process Technology Committee
Remote CORAL
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RGL
Research Group Laboratories
Safety Diamond
Symbol used by the NFPA to classify various hazard ratings. The diamond is broken into four sections. Numbers in the three colored sections range from 0 (least severe hazard) to 4 (most severe hazard). The fourth (white) section is left blank and is used only to denote special fire fighting measures/hazards. also known as the NFPA Safety Diamond
Si
Symbol for the element silicon
SOE
School of Engineering. Also abbreviated as SoE. | link
SOI
Silicon-on-Insulator
SOP
Standard Operating Procedure
SPR
Semiconductor Process Representation
TCAD
Technology Computer-Aided Design
TNA
Training Needs Assessment
TRL
Technology Research Laboratories. Located on fourth floor of Building 39. Class 100 cleanroom. CMOS-compatible, optoelectronic, MEMS devices fabricated here.
User
Commonly meant to refer to those Using MTL's fabrication facilities.
UWB
Ultra Wide Band
VLSI
Very-Large-Scale Integration
VLSI Seminars
Semi-weekly seminar series held in the spring and fall, hosted by MTL. | link
Wafer
A small thin circular slice of a semiconducting material, such as pure silicon or quartz, on which an integrated circuit can be formed.
Web Member
Term given to those with an account to access various features of MTL website on the internet. Examples include Remote CORAL use and MIG Members Only use as well as MyMTL accounts. | link
 

MTL Annual Research Report 2016: View Online