Low cost SIMS analysis

From: H. Sho Fuji (fuji@u.washington.edu)
Date: Tue Sep 19 1995 - 17:41:21 EDT

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I am interested in determining the silcon content in as-deposited
films of an Al-1%Si alloy deposited by e-beam evaporation. I believe
that SIMS and Auger will provide sufficient resolution for the analysis.
Charles Evans Inc is quoting $650 for analysis of two samples - I would
like know if there is another lab (private or university) that can do the
job cheaper? Unfortunately, I do not have access to SIMS or Auger on
campus here - and budgets are tight......

Also, if anyone has experience with evaporation of aluminum alloys and
can recommend any tips or protocols to help maintain film composition
over successive evaporations, please let me know. I do not have a sputter
system at my disposal.

Thanks in advance,
Sho

************************************************************************
  H. Sho Fuji | Phone: (206) 616-1381
  WTC Microfabrication Laboratory | Fax: (206) 543-3059
  Box 352140 | e-mail: fuji@u.washington.edu
  University of Washington
  Seattle, WA 98195-2140

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