Pad Etch

From: H. Sho Fuji (fuji@u.washington.edu)
Date: Thu Oct 12 1995 - 13:27:08 EDT

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I am looking for information on wet chemical "Pad Etch" solutions that
can be used to etch a passivation layer (2000A LTO/7000A PSG/20000 A LTO).
I understand that Ashland makes some etchants, but am having a hard time
getting any information from them.

Any information on formulations, other vendors/products or etch rates of the
Ashland products would be appreciated.

Thanks!

Sho

************************************************************************
  H. Sho Fuji | Phone: (206) 616-1381
  WTC Microfabrication Laboratory | Fax: (206) 543-3059
  Box 352140 | e-mail: fuji@u.washington.edu
  University of Washington
  Seattle, WA 98195-2140

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