One of our students would like to deposit BN thin films, < 1um, hexagonal
structure. We do not have a CVD system to do this and we are looking for
some way to obtain samples for proof of concept testing.
Can anyone help? I am open to any ideas. Pls mail to voros@eecs.berkely.edu.
Thank you.
Katalin
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| University of California at Berkeley |
| Department of Electrical Engineering and Computer Sciences |
| |
| KATALIN VOROS |
| Principal Development Engineer |
| Manager |
| voros@eecs.berkeley.edu |
| |
| EECS/ERL Microfabrication Laboratory | fax: (510) 642-2916 |
| 406 Cory Hall # 1770 | phone: (510) 642-2716 |
| Berkeley, CA 94720-1770 | preference: e-mail |
| www http://argon.eecs.berkeley.edu:8080 |
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