I would like to take an informal survey of the labs with LPCVD systems
to get some feedback on cost, maintenance, and safety issues. Hopefully
this information will be of interest to other labs as well.
The survey questions are as follows:
1) Do you use hydrocarbon or PFPE (Fomblin or Krytox) oil in your
LPCVD pumps? What factors went into this decision, other than the
obvious one of cost of oil?
2) Does anyone run dry pumps for any processes (esp. nitride)?
3) How often do you change the pump oil and perform rebuilds on the
pumps? Do you track this by process hours (eg, so many microns of
depostion) or operation hours?
Any feedback is appreciated; other users' experiences are much more
valuable (and trustworthy) than any information from pump vendors!
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