Equipment needed

From: cellis@eng.auburn.edu
Date: Thu Jun 27 1996 - 18:15:47 EDT

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I am looking for the following items:

4" photoresist track system.
5cm ion gun.
4" wafers.
8" flat cryopump (CTI). Just the pump ( not compressor ).
constant temperature BOE and PAE etch tanks for 4" wafers.

If you can help please E-Mail me.

Thanks,

Charles Ellis......

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