Dear All,
We are getting an Electron Cyclotron Resonance Plasma Etcher which will use
Cl_2 and BCl_3 (among other gases). For pumping, we will get a magnetically
levitated turbopump. Our question concerns the backing pump for the turbo;
namely choice between an oil-pump or a dry-pump.
The backstreaming of the oil is the main disadvantage of the oil-pump. The
disadvantages of the dry pump (according to a couple of people who have used
them) are:
1. They are about $15K more expensive
2. They break down more often (corrosion may have more catastrophic result
because of their tight tolerances?)
Do you have any experience/advice?
Sincerely,
Jim Sturm and Mansour Shayegan
sturm@ee.princeton.edu, shayegan@ee.princeton.edu
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