UC Berkeley uses a Canon FPA-141F 4x mask aligner for small wafer
substrates and GaAs substrates. The Canon FPA-141F uses a round, precision
fused silica discs, anti-reflection coated as a planar image plane. These
discs are subject to damage and need to be replaced from time-to-time.
Canon will no longer supply this item. I have secured a quote from an
optics company for custom fabricated replacement discs. As is usual in
custom glass fabrication the more pieces we order the lower the cost.
If you have a Canon FPA aligner and are interested in sharing the cost of
custom fabrication of fused silica discs e-mail me. I will get back to
you with the particulars.
Sincerely,
Bob Hamilton
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| University of California at Berkeley |
| Department of Electrical Engineering and Computer Sciences |
| Bob Hamilton |
| Senior Development Engineer |
| Maintenance Supervisor | bob@eecs.berkeley.edu |
| EECS/ERL Microfabrication Laboratory | fax: (510) 642-2916 |
| 406 Cory Hall # 1770 | phone: (510) 642-2716 |
| Berkeley, CA 94720-1770 | preference: e-mail |
| www http://argon.eecs.berkeley.edu:8080 |
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