Ion Source Power Supply

From: Peter Naor (QVR1.PETE@worldnet.att.net)
Date: Sun Feb 16 1997 - 20:59:23 EST


Dear Labnetwork Members;

I am the principal of QVR Designs, which is an R&D and manufacturing
firm, located in San Diego and providing Power Supply Technology and
Instrumentation solutions for wafer fabs.

Most recently we developed a new Ion Source Power Supply.
For example; configured for a Freeman type ion source in a low
current Implanter the power supply provides up to 1000 Watts of
Filament power and 600 Watts of arc power and it weighs only 16Lb.
Currently, this configuration works at a major fab in CF3000 Implanters!
Other configuration is evaluated with a Bernas source!

Moreover, QVR technology is modular and flexible so that other power
supplies, from Watts to Kilowatts can be configured and packaged fast
for other ion sources and specific power needs for your Ion Implanters.

Moreover, the power supplies can be controlled via IEEE488 bus and
fiberoptic links.

QVR power supplies are easy to configure for any power levels and I am
interested to satisfy your research and production needs!

Thanks and Best Regards,

Peter Naor
 QVR DESIGNS
 17212 Pacato Pl.
 San Diego CA 92128
 Fax at 619-592-0152,
 Phone at 619-592-0932.



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