SiO2 plasma etching

From: Jim Sturm (sturm@EE.Princeton.EDU)
Date: Fri Apr 11 1997 - 16:21:38 EDT

Dear all, we are trying to plasma etch SiO2 anisotripically
(not so hard), which leaves a low-damage Si surface exposed at
the end on which to grow selective epi (the hard part). We often
get a brown (pitted) Si after the end of the SiO2 etch.

ANy ideas?

Any magic recipes?

Thanks, Jim Sturm

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