Looking for equipment

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We are looking for
1. LPCVD stack of furnaces (nitride, LT oxide, poly), 4" or more size,
with all plumibng, pumps, controls, in good condition/refurbished

2. Cl-based etcher with load-lock, for poly and/or Si trench.
Cassete to casset NOT required.

Reply to Jim Sturm, Princeton University, 609-258-5610, sturm@ee.princeton.edu

THanks, JCS

********************************************

James C. Sturm Phone: 609-258-5610
Professor Fax: 609-258-6279
Department of Electrical Engineering email: sturm@ee.princeton.edu
Princeton University
B404 E-Quad, Olden St.
Princeton, NJ 08544 USA

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