Poisoned target

From: golnas@stanford.edu
Date: Mon May 26 1997 - 18:33:54 EDT

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I was trying to condition a Al2O3 target for sputtering
using a pulsed power supply but due to backscattering
I have poisoned the target.
I am looking for suggestions as how to clean the 2 in. diameter
alumina disk which is bonded on a copper cap.
Thanks

-- Tassos Golnas

"Don't you have rollerskates in Germany?" Anonymous skater

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