We are in the process of doing some mechanical modeling of X-ray and other
advanced masks, in order to quantify distortions. For this, we need input
parameters such as Young modulus, poisson ratio, density, thermal
conductivity of materials like Si, SiO, SiN, SiO2, and so forth. Obviously,
they will be process-dependent but some starting point would be useful.
Also, we seek the same data for resist materials such as SAL-605, APEX, etc.
Is there a good review paper/book out there or a compilation of these
properties? The search for these data is always frustrating... at the same
time I am sure we aren't the first ones to have this need.
Thanks, and happy microfabrication to everybody...
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