Aluminum Oxide by e-beam evaporation

From: Tassos Golnas (golnas@rpl.Stanford.EDU)
Date: Fri Sep 19 1997 - 14:31:55 EDT


Some company here at the Bay Area tried to deposit
Aluminum Oxide on a stainless steel substrate by
e-beam evaporation, using an aluminum oxide source
and 'bleeding' some oxygen in the chamber.

The resultant film is black (!?), or -more correctly- very
dark colored. It is insulating, yet it is cracked and it leaves
small holes so one can see the steel underneath.

They have no clue why the film got this color and neither do I.
Does anyone have a suggestion or can refer me to people who have
tried the experiment before?

Thank you.

Tassos



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