Need Si etch that won't etch SiNx

From: William B. Lanford (wlanford@phoenix.Princeton.EDU)
Date: Thu Oct 09 1997 - 13:47:12 EDT

Greetings all,

I need to etch through an amorphous silicon layer but not the underlying
(and surrounding) silicon nitride layer. Does anyone know of an etchant
(RIE) that will etch Si, but not SiNx, to a high degree of selectivity?

Many thanks in advance,
Bill

-----------------------
William Lanford x9670
5 Prospect Avenue
wlanford@princeton.edu

This archive was generated by hypermail 2b29 : Tue Mar 09 2004 - 07:49:00 EST