Cleaning Photomasks

From: malone@micsrv1.mic.dtu.dk
Date: Mon Oct 20 1997 - 08:52:55 EDT

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Hello Everyone,

I am looking for information on cleaning photomasks. I am currently
using a "7-Up" clean (primarily H2SO4) but would like to convert to
something less caustic. Does any one have a reference or two for
common photomask cleaning procedures? I used a photomask cleaner
called "CA-40" 2 or 3 years ago and I can't seem to remember who the
manufacturer is.

Thanks,

Kevin J. Malone
IONAS A/S
malone@mic.dtu.dk

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