5" Wafer Bowing with Heatpulse 210

From: rdljh@attme.att.com
Date: Mon Nov 24 1997 - 21:13:03 EST

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Hi,
I have to find a way to minimize major bowing that i am seeing in 5"
wafers when using the Heatpulse 210 flash annealer.Varying ramp rate,
intensity, ect. does not seem do be making a significant difference. Are
they any quartz trays available that can eliminate or reduce the bowing?
Thank you for your time!!
Michelle Bermel
mbermel@lucent.com

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