Rasmus:
I think that most people would agree that the first thing to do is try
lowering the temperature. If memory serves, the transition between
amorphous and poly deposition occurs somewhere near 580 deg C.
Our normal poly deposition is done at 610 and we typically do amorphous at
either 550 or even 525 deg C .... and we run flows and pressures at the same
value as our poly recipe.
Good luck,
John
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