I would appreciate your comments on what you have done to address the safe
usage of 100% Silane in your cleanrooms, and whether or not you have had
problems. When I mentioned using this gas as being required for our poly
silicon process, red flags from various corners went up, with comments like
you have to use 4% or less. I plan to use a new Semi Gas Auto purge 2
cylinder enclosure, A N2 purged vacuum pump into a Delatech Inc. CDO burn
box, also N2 purged and exhausted. The furnace will be a Tylan/Tystar re
furbished 4 stack ,with one tube for poly. I am looking for reassurance
from you who have been doing this for some time that it can be a safe
process, so I can lower the flags. Also is it even practical or possible to
grow good poly with dilute SiH4? Any help will be much appreciated. Did you
have outside consultants address any of the safety issues? Thanks, Jerry
Gerald N. Hill Sr.
Associate Director, Operations
Microelectronics Research Center
791 Atlantic Drive
Atlanta ,GA 30332-0269
(404) 894-5030, Fax 5028
Pager( 404) 655 2197
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