RIT Micro Electronic Engineering Department would like to hear from
anyone who performs LPCVD processes in multiple process tubes and
combines exhaust treatment.
We are looking for a solution to a cost and floor space problem that
does not compromise safety. Our desires are to combine the exhaust of
two LPCVD systems, running different processes, into one exhaust
treatment scrubber system. Our concerns are how to perform a process
like LTO in one tube exhausting oxygen, and at the same time run the
other system doing a Poly process exhausting silane, and safely
combining them into one treatment process such as a gas reactor column.
If anyone has a system where combined exhausts are treated, we would
greatly appreciate any insight you may offer that would provide a safe,
economical and floor space efficient solution.
Bruce E. Tolleson
BETEMC@RIT.EDU
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