RIT's Microelectronic Engineering Department would like to hear from
anyone using a 6 inch ASM PECVD/LPCVD. Specifically, we need to know if
anyone has an upgrade to the upgrade to the older magnetic tape drive
which functions with the stand alone tube controller(SATC). We want to
up/download recipes using a floppy disk in place of the tape drive, or
directly from a PC using an RS-232 board. We are having problems with
the tape drive and have no ability to save an altered recipe with our
current system.
If anyone has information available please e-mail:
BETEMC@RIT.EDU
P.S. Thank you for the overwhelming response to my last request. If I
didn't reply to you I apologize. The response was so good that I
replied to over twenty of the 48 messages received and resolved my
problem almost immediately. Thank you for your help.
This archive was generated by hypermail 2b29 : Tue Mar 09 2004 - 07:49:01 EST