My name is James Zhou and I am responsible for building up Georgia Tech's CMOS baseline process to support variety research programs. Right now we are installing a Poly furnace and trying to grow our first poly. The recipe is following:
T=620C; Presure=300mT; SiH4=100sccm; and t=30min
When we use ellipsometer to measure the poly, it gives wide range of index number, from 1.6 to 9.9. Any suggestion on what went wrong?
Thanks in advance.
-- Zhiping (James) Zhou, Ph.D. Senior Research Scientist Project Leader, CMOS
Georgia Institute of Technology Tel: 404-894-5172 Microelectronics Research Center Fax: 404-894-5028 791 Atlantic Drive NW, Room 128 Email: email@example.com Atlanta, Georgia USA 30332-0269 or firstname.lastname@example.org
WWW URL http://www.ee.gatech.edu/users/zjz/
This archive was generated by hypermail 2b29 : Tue Mar 09 2004 - 07:49:01 EST