Polysilicon measurement

From: Z. James Zhou (zz3@prism.gatech.edu)
Date: Wed Nov 11 1998 - 14:40:23 EST

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Hello,

My name is James Zhou and I am responsible for building up Georgia Tech's CMOS baseline process to support variety research programs. Right now we are installing a Poly furnace and trying to grow our first poly. The recipe is following:

T=620C; Presure=300mT; SiH4=100sccm; and t=30min

When we use ellipsometer to measure the poly, it gives wide range of index number, from 1.6 to 9.9. Any suggestion on what went wrong?

Thanks in advance.

James Zhou

-- Zhiping (James) Zhou, Ph.D. Senior Research Scientist Project Leader, CMOS

Georgia Institute of Technology Tel: 404-894-5172 Microelectronics Research Center Fax: 404-894-5028 791 Atlantic Drive NW, Room 128 Email: james.zhou@mirc.gatech.edu Atlanta, Georgia USA 30332-0269 or zz3@prism.gatech.edu

WWW URL http://www.ee.gatech.edu/users/zjz/

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