We are trying to improve the temp/humidity control for our microfabrication cleanroom. We have difficulty controlling humidity during the hot and humid summer months. I'm hoping that you can help us answer a couple of questions as we re-examine this problem. Please forward this message to anyone that you think might be willing to provide some input.
The Data Storage Systems Center microfabrication facility has 3000 sq. ft. of class 10 and class 100 cleanspace and is used for the typical processes related to the fabrication of advanced thin film heads, media, semiconductor devices, and MEMS devices. We are currently using a 38 F chilled water/glycol system for temperature and humidity control.
What are the temperature and humidity control specs for your similar facility?
Are you able to control to tight specs in the summer?
How is temp/humidity control typically achieved for a facility like this in a high humidity (summer months) region?
Thanks --- Chris
Chris Bowman
Carnegie Mellon University
ECE Dept.
Pittsburgh, PA 15213
P (412) 268-2471
F (412) 268-4323
ccbowman@ece.cmu.edu
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