I don't know the answer to these questions, but if someone does, PLEASE
SEND TO THE MAILLING LIST. This has to be one of the toughest facility
design/operation problems we midwesterners have to face!
At 09:35 AM 11/13/98 -0500, Chris C. Bowman wrote:
> We are trying to improve the temp/humidity control for our
>microfabrication cleanroom. We have difficulty controlling humidity during
>the hot and humid summer months. I'm hoping that you can help us answer a
>couple of questions as we re-examine this problem. Please forward this
>message to anyone that you think might be willing to provide some input.
> The Data Storage Systems Center microfabrication facility has 3000 sq.
>ft. of class 10 and class 100 cleanspace and is used for the typical
>processes related to the fabrication of advanced thin film heads, media,
>semiconductor devices, and MEMS devices. We are currently using a 38 F
>chilled water/glycol system for temperature and humidity control. What
>are the temperature and humidity control specs for your similar facility?
>Are you able to control to tight specs in the summer? How is temp/humidity
>control typically achieved for a facility like this in a high humidity
>(summer months) region? Thanks --- Chris Chris Bowman Carnegie Mellon
>University ECE Dept. Pittsburgh, PA 15213 P (412) 268-2471 F (412) 268-4323
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