****************
Electron Beam Lithography for Nanostructure Fabrication Workshop
Call For Papers and Participation by Research Staff and Students
The Network Access Committee of the National Nanofabrication Users Network
will hold a WORKSHOP on Electron Beam Lithography for Nanostructure
Fabrication, at Cornell University on Jan.14-15.1998 . Emphasis will be on
nanostructure fabrication in university laboratories. Informal
presentations are solicited.
This is an informal workshop, for exchange of ideas, results and
technologies amongst researchers, technology that might not get shared at a
formal conference yet is critical to successful fabrication. The primary
audience will be the academic research staff and senior graduate students
at university fabrication facilities, although all others are invited to
participate as well. Mask fabrication by ebeam lithography is NOT included
but most other applications are.
Topics for discussion will include instrument operation and
characteristics, resist evaluation, pattern specification, exposure and
fabrication schemes, and novel applications. Both SEM based and commercial
system lithography are included. Discussions of non-microelectronic
applications of ebeam lithography are particularly encouraged.
This workshop follows prior NNUN workshops on Reactive Ion Etching,
Photolithography, and BioMEMS held in recent years at UCSB , Penn State,
and Stanford, respectively. They are an outreach effort of NNUN to promote
exchange of microfabrication techniques and procedures within the academic
community. Considerable information exchange on the primary topic, as well
as general laboratory operation, is expected.
TECHNICAL CONTRIBUTIONS ARE SOLICITED FROM ALL, on the above listed topics.
Please contact Lynn Rathbun at Rathbun@cnf.cornell.edu or 607-255-2329 x
110
Tentative Schedule
Thursday Jan. 14. Workshop presentations and discussions all day
Breakfast and lunch provided
Dinner by arrangement, not included
Friday.Jan 15...laboratory tours and equipment demonstrations
Possible vendor demonstrations (microscopes, CAD, etc).
Breakfast provided
Lunch optional
End Friday noon.
Jan. 14-15 , 1998
Phillips Hall
Cornell University
Ithaca, New York 14853
Registration $75, includes meals except dinner.
For information , http://www.cnf.cornell.edu/ebeam.html
or Email mallison@cnf.cornell.edu or call 607-255-2329 x 106
*****************************************************
Dr. Lynn Rathbun, User Program Manager Voice (607)-255-2329 ext 110
Cornell Nanofabrication Facility FAX(607)-255-8601
Knight Laboratory-Cornell University email Rathbun@cnf.cornell.edu
Ithaca, New York 14853 http://www.cnf.cornell.edu/
Webmaster @ Christian World Adoption http://www.cwa.org/
Webmaster @ Joint Council on International Children's Services www.jcics.org
(any opinions or representations of fact re: adoption are my own however)
*****************************************************
This archive was generated by hypermail 2b29 : Tue Mar 09 2004 - 07:49:01 EST