At San Jose State University we are developing a new
undergraduate BS program in Microelectronics Process
Engineering. This curriculum will educate students for
entry-level jobs in the development and manufacturing of
microelectronics, data storage devices, semiconductor
equipment and related industries. We intend to provide
CMOS capability in the 2 micron range for our senior
level fabrication course.
To support this program, we will be renovating our
existing 4-inch wafer fab which contains 20-year-old
(at least) technology. We are in the process of deciding
whether to stick with 4-inch or go to 6-inch wafers.
We would be very interested in your comments regarding
similar decision-making processes you may have gone
Our lab will be mainly for educational purposes for
undergraduates, rather than for graduate research, so
please keep that in mind as you discuss your experiences.
Specifically, we would like your comments on the following
Please answer by e-mail, or fax. Thanks for your assistance.
1. Have you encountered difficulty in purchasing new,
or finding donations of used 4" equipment? Is 6" easier?
2. Has the availability of the processes you want to run been
equipment limited in 4-inch? Technical limitations?
3. If you are currently running a 4-inch lab, have you
encountered any difficulty in finding technical support
and/or parts for older 4-inch equipment?
4. Have you ever encountered difficulty in obtaining 4-inch
silicon wafers of the specification you need for your processes?
Do you feel this is going to be a problem in the future?
5. Has the increased usage of liquid and hazardous
chemicals in switching to 6-inch been a factor in a decision
for your facility?
6. Have you been forced into a higher level of automation
than you want for your students, due to switching to 6-inch
equipment? Is the students' experience still "hands-in" ?
We appreciate any comments you can make.
Fax 408-924-4057 Phone 408-924-3879
Thomas R. (Tom) Boag
J.D. Pinson Process Engineering Chair
and Adjunct Professor
MicroElectronics Process Engineering Program
Department of Chemical/Materials Engineeirng
One Washington Square
San Jose, CA 95192-0082
My Office Phone (408-92) 4-3879
My Fax (ChemMatl) (408) 924-4057
My Cellphone (Emerg.) 1-650-767-8371
My Home Phone 1-650-968-6688
E-Mail: email@example.com or firstname.lastname@example.org
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