Kevin:
We have a Canon PLA-501FA ... although we don't use it very much and
don't actually use either the automatic alignment or the cassette in/out
features on it.
For starters, you could check out our on-line operating procedures.
Our website is http://www-snf.stanford.edu. Once there, you can click
on "SNF Equipment" and the "Optical Lithography". THe Canon 501 is
listed under there.
I'll bet that there are some of these in other universities that are
more heavily used than our ... and that there are folks in other
universities that are much more knowledgeable about them than I, but I
hope that this is a start.
Good luck,
John
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