Re: anisotropic etching of glass

From: Min-Hao M. Lu (minhaolu@EE.Princeton.EDU)
Date: Mon Feb 22 1999 - 17:59:13 EST

Dear all,

I'm trying to anisotropically etch several microns of soda lime glass (lower
grade than Corning 7059). Reactive ion etching with CF4 based chemistry
turns out to be extrememly slow -- on the order of 5 nm/min. I would
appreciate any help in finding a more effective etching method.

Thanks in advance,

Mike

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Min-Hao Michael Lu http://www.princeton.edu/~minhaolu
EMD group, EE, Princeton U. ... on surrender follows peace.
minhaolu@princeton.edu -- Bhagavard Gita 12:12

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