OPAL (AMAT) 7380Si
Automated CD-SEM measurement system. Excellent condition.
Set up for 6" (can be configured for 8")
Fully automated, pattern recognition, low voltage SEM operation and SEM
autofocus.
Contact Prof. Rashid Bashir at (765)496-6229 or bashir@ecn.purdue.edu for
more details.
_________________________________________________________________________
| Mike Young young@purdue.edu Purdue University ECE Dept. |
| W. Lafayette, IN 47907-1285 http://www.ece.purdue.edu/~young/ |
_________________________________________________________________________
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