Selective Etch of Al over Mo

From: Al Tasch (tasch@roz.mer.utexas.edu)
Date: Fri Jun 11 1999 - 15:23:52 EDT

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Hello,

We are trying to identify a wet etch for Aluminum that will not etch
Molybdenum (selectivity of at least 15:1). We are aware of KOH, but
would like to use some other etch if such exists. If anyone knows of
such etches, we would be very grateful for the information. Thanks
in advance for any help that anyone might be able to provide.

Regards,

Al Tasch

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