Does anyone have any information or experience working with LAM 690
metal etch or TRION Mini-Lock systems? We are considering several
possibilities, new and used, for single wafer metal etch systems
suitable for low volume university fab use. If you have experience with
any other single wafer load locked metal etch systems, please pass them
on.
Thank you,
Scott P. Blondell
Facilities Manager
Microelectronic Engineering Dept.
Rochester Institute of Technology
Rochester, NY 14623
spb1699@rit.edu
http://www.microe.rit.edu
716-475-2171 v
716-475-5041 f
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