Good day:
I have recently obtained a Perkin Elmer 4410 DC sputtering system for
installation into a new university cleanroom. While looking through the
manual, I come upon what seems to be a contradiction in the water flow
requirements. I was hoping someone out there has a similar tool and can
assist me.
In one part of the manual, it states that 15gpm process chilled water is
required, but in another section it states 2-4 gpm. I'm wondering if
the 15 is a misprint and should be 1.5 gpm. We are trying to size our
process chilled water system, and this will make a large difference in
the size of the system initially required.
Thanks!
Beth Fuchs
Research Engineer
University of New Mexico
Manufacturing, Training and Technology Center
MTTC Building
800 Bradbury SE
Suite 235 Room 239
Albuquerque, NM 87106
(505) 272-7168 or (505) 272-7844 phone
(505) 272-7152 or (505) 272-7801 fax
bfuchs@chtm.unm.edu e-mail
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