annealing boron implants

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Can anyone give me some idea of what temperatures and times are required
for anealing a low energy boron implant?

Thanks,

Rick
Ibadex, L.L.C.
57 North Putnam St.
Danvers Ma. 01923
(T): 978-777-5500
(F): 978-777-6575
rbecker@ibadex.com

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