We have a supply of Fluoroware 6 inch polypropylene transport wafers
carriers available for trade. We have a variety of different colors. We
can send a copy of the Fluoroware operations manual which describes the
exact physical dimensions. The upper temperature limit is 70 degrees
centigrade.
We also have spare quartzware for Tokyo Electron (TEL) vertical LPCVD
(alpha 6) systems.
Contact:
Cary Metzger
VMC1 Lab Manager
Virginia Commonwealth University
(804) 827-7000 ext 209
ctmetzge@saturn.vcu.edu
or
Dr. Robert Pearson
Associate Professor
Virginia Commonwealth University
(804) 827-7627
repearso@vcu.edu
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