looking for way to isotropically etch Si and stop on SiGe or P++

From: Haizhou Yin (hyin@EE.Princeton.EDU)
Date: Mon Jul 31 2000 - 16:52:34 EDT

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I need to find a liquid etchant which can isotropically etch Si while
stop on SiGe layer or on P++ Si layer. KOH solution seems a good
candidate, but it is anisotropic.

Your information is highly appreciated!

thanks,

haizhou
hyin@ee.princeton.edu

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