MEMS Facility

From: Dr. Mustafa A.G. Abushagur (abushagu@ebs330.eb.uah.edu)
Date: Wed Aug 16 2000 - 11:40:00 EDT

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We are in the planning stage of setting up a MEMS facility at UAH mainly for surface micromachining.

I'll appreciate it greatly if you can advice us about equipment that you suggest.

Thanks

Mustafa Abushagur

********** Automaatic Signature ************
Mustafa A.G. Abushagur, Ph.D.
Professor
Electrical and Computer Engineering Department
The University of Alabama in Hunsville
Huntsville, AL 35899

Tel. (256)824-2882
Fax (256)824-6618

abushagu@ece.uah.edu
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