We have our e-beam litho tool running here at UTD. I have a translator
I 've used for years with AUTOCAD 1.4
It won't work with the new Autocad versions.
Does anyone have an 1.4 they would sell?
Autodesk (the company) hasn't replied to my requests for an archive copy
copy.
This would help avoid a lot of rewrite.
We have 5 inch mask capability and chucks to hold any substrate, any
size, from 10 mm to 5 inches.
Currently we doing .2 uM , but are still charecterizing the machine.
We are bringing a second e-beam with 6 inch capability on line this
fall.
Keith Bradshaw
972-883-2099
University of Texas at Dallas
Microelectronics Clean Room
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