backside wafe polishing?

From: George J. Valco (valco.1@osu.edu)
Date: Thu Oct 12 2000 - 16:02:49 EDT


I have a 100mm diameter SIMOX wafer that I need to get polished on the back
side. A couple weeks ago I made inquiries at a number of companies that I
found in a buyer's guide. However, the companies I contacted were only
interested in large batches or were unresponsive (said they would get back
to me but didn't, or didn't respond to my e-mail).

Can anyone one this list recommend a polishing service that will polish the
backside of one wafer or of a small batch of wafers?

Thanks,
gjv
---------------------------------------------------------------------------
George J. Valco, Dept. of Electrical Engineering Rm 373 Caldwell Lab
The Ohio State University (614) 292-5110
2015 Neil Ave., Columbus, OH 43210 FAX: (614) 292-7596
http://eewww.eng.ohio-state.edu/~valco/ Valco.1@osu.edu



This archive was generated by hypermail 2b29 : Tue Mar 09 2004 - 07:49:04 EST