At CAMD/LSU, we have a class 100 cleanroom with a
variety of lithography, thin film deposition, and
metrology equipment serving about 50 registered users.
We would like to automate the equipment reservation
and logon/off process by using some type of integrated
software/hardware. I know that MIT has a system called
CAFE but I am not aware of its capabilities. Can
anyone point me towards any software commercial or
otherwise that can do this efficiently? Is CAFE
available at the market place?
Yohannes M. Desta
Research Associate, CAMD/LSU
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