HIPOX for growing thick SiO2 films

From: Sailing He (sailing@tet.kth.se)
Date: Tue May 01 2001 - 18:49:28 EDT

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Hi,

We're looking for High Pressure Oxidation (HIPOX) System for
growing thick SiO2 films.
I would appreciate very much if anyone can tell me a company (besides
Gasonics) which sells such a HIPOX.

Many thanks in advance,

Sailing He
sailing@ieee.org

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