We have done that in the past for some BioMEMS application.
We use EDP with oxide mask for <100> wafers.
Ashutosh Shastry Research Associate,
Graduate Student, Microelectronics Group,
School of Biosciences and Electrical Engineering Dept.,
Phone: 091-22-5721791 I.I.T. Bombay, INDIA 400 076.
Email: email@example.com Phone:091-22-5723655
O Traveller, there is no such thing as PATH...
.....paths are MADE by walking.
On Thu, 12 Jul 2001, Hiren Thacker wrote:
I am trying to create anisotropic through hole vias on a Si wafer. Has
anyone done this kind of Si etch before? Please email me at
firstname.lastname@example.org if you have as I'd like to get more information about
Georgia Institute of Technology
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