We are trying to locate a set of maintenance manuals for an Oxford
Dual Plasmalab ÁP 80-800 RIE/PECVD, in order to repair the system.
Oxford will no longer provide field service support or the manuals
for this unit, but we believe we could repair it if we could lay our
hands on a set of manuals.
We would be glad and very willing to pay for the manuals or to pay
for a copy of them, if anyone has a set in there possession!!
Any help would be greatly appreciated!!
Thanks very much!
University of California, San Diego
9500 Gilman Drive
Department of Electrical and Computer Engineering, Mail Code 0407
La Jolla, CA 92093-0407
PATRICE E. STREHLE
Integrated Technologies Laboratory (iTL)
iTL Operations Manager
Office: Engineering Building Unit 1/Room 1201
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