We are currently looking to purchase a coater/developer system. We are considering
either two MTi omni-chuck or multifab units or possibly a Semiconductor Systems Track
System Model PBCS31/3. Does anyone have any words of wisdom on either of these systems.
Primarily we are interested in reliability and in-house serviceability. Any comments
would be greatly appreciated.
Regards
Neil Peters
Process Lab Engineer
Department of Chemical and Materials Engineering
http://www.engr.sjsu.edu/cme
San Jose State University voice: (408) 924-3967
One Washington Square fax: (408) 924-4057
San Jose, CA 95192-0086
E-mail: npeters@email.sjsu.edu
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