Reactive Ion Etcher

From: Kevin Craig Holmes (kevin.c.holmes@alumni.vanderbilt.edu)
Date: Tue Jun 25 2002 - 16:09:56 EDT


We are interested in acquiring a Reactive Ion Etcher for our lab. Would
anybody have any suggestions concerning good models from the used market for
research institutes, or smaller research specific models like the March
CS1701. Any information would be helpful. Our primary uses would be for
etching dielectrics and MEMS.

Sincerely,

Kevin

____________________________
Kevin C. Holmes M.S.
Vanderbilt Diamond Technology

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