Question

From: Chongfei Shen (cfshen@ee.princeton.edu)
Date: Mon Aug 05 2002 - 16:37:00 EDT

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I ran across your website, can I post a question here?

How to wet etch AlAs (with high C concentration >10^20cm-1)?
I tried citric acid, H2O2, and sulfuric acid, H2O2, they didn't work. They
worked for AlAs with low C concentration.

Your help will be highly appreciated.

Chongfei

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