Dear Lab Network Colleagues:
I need some advice regarding usage, drawings and spare parts scrounging for
an older AG Associates 210M RTP system. I recently inherited this "old" AG
Associates Model 210M RTP benchtop system as well as a manual for the
slightly newer and similar AG Associates 210T RTP system. Our 210M has a
quartz wafer holder for 4 inch wafers and seems to work OK in terms of
automatic heating control (with the original Rockwell controller), but
there is definitely no environmental isolation between the wafer and the
ambient air. Thus, we cannot RTP in an inert environment like Argon.
There is a gas inlet connection on the back, and we can see where the gas
enters the rear of the electropolished stainless steel inner heating
chamber via a small protruding tube (about 1/4 inch diameter or
smaller). There is no quartz barrier between the wafer and the halogen
lamps, and the inner reflective stainless steel chamber alone is simply not
airtight enough to provide an inert environment even if we flow a lot of Ar
into the chamber.
The 210T manual suggests that there should be a quartz inner chamber that
surrounds the wafer and tray and isolates the wafer from the lamps and
reflective inner stainless steel chamber. It connects to the back gas
inlet tube (also provides back support for the chamber), and rests on the
lip by the front door of the chamber. The entering gas seems to exit by
another connection near the front of the door.
Unfortunately, AG Associates no longer exists and I can't get help from the
folks who bought them.
Can anyone with a similar AG Associates 210M (or T) system provide me with
some additional guidance regarding the implementation of a quartz inner
chamber for this system? Does anyone have more detailed installation
instructions and drawings/specs for this quartz chamber? Perhaps a
possible vendor for this quartz chamber? Any useful advice will be
appreciated. I am trying to get this system ready for one of my students'
MS projects.
Many thanks!
Carlos
****************************************************
Dr. Carlos J. Gutierrez
Professor, Physics Department
Southwest Texas State University
601 University Drive
San Marcos, TX 78666 USA
e-mail: cg08@swt.edu or carlos_g@swt.edu
phone: (512) 245-3647, fax: (512) 245-8233
X-ray/SEM lab: (512) 245-2407
Ion Beam Sputtering Lab: (512) 245-2366
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