We have a reconditioned RIE/PECVD system available for sale. The system is a
dual chamber RIE/PECVD tool with shared pumping and shared RF and matching
network. The system has been equipped with a new turbopump (300 l/s BOC
Edwards turbo), and uses a 500 m3/h booster package for process pumping of
the PECVD chamber. Both chambers offer a substrate table that is 8,3" in
diameter, with a dual showerhead gas introduction system. The system will be
ready for delivery within 2 months upon receipt of purchase order. Attached
is a PDF showing some more details of the system.
Please do not hesitate to contact us if You are interested, or require
further information!
Med vänliga hälsningar/Best regards,
Advanced Vacuum AB
Thomas Engstedt
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Advanced Vacuum AB, a leading supplier of vacuum and thinfilm technology
Industrigatan 21, 234 35 Lomma, Sweden
Phone : +46 (0)40 534070, Fax : +46 (0)40 411318
Web : http://www.advanced-vacuum.com <http://www.advanced-vacuum.com>
http://www.advanced-vacuum.se <http://www.advanced-vacuum.se>
(swedish site only!)
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<<Reconditioned RIE_PECVD letter.pdf>>
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