The UCLA Nanoelectronics Research Facility has a GaSonics Aura 1000
downstream asher (presently stored in its clean room) for sale. We are
asking $25K for it. It is configured for 4inch wafers and has a plasma
stability problem but is otherwise complete (pumps and chiller not included)
Please email Steve Franz (franz@nanolab.ucla.edu), if you have an interest
in this machine.
Thanks
Steve Franz
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