GaSonics Aura 1000 for sale

From: Steve Franz (franz@nanolab.ucla.edu)
Date: Mon Sep 30 2002 - 18:45:47 EDT


The UCLA Nanoelectronics Research Facility has a GaSonics Aura 1000
downstream asher (presently stored in its clean room) for sale. We are
asking $25K for it. It is configured for 4inch wafers and has a plasma
stability problem but is otherwise complete (pumps and chiller not included)

Please email Steve Franz (franz@nanolab.ucla.edu), if you have an interest
in this machine.

Thanks

Steve Franz

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