e-beam contamination issues with Fe/Co

From: Joe Palmer (jpalmer@princeton.edu)
Date: Tue Oct 08 2002 - 13:25:06 EDT


I am interested in finding out if there are any serious contamination
issues with evaporating iron or cobalt in a chamber that will then be
used to evaporate other materials onto silicon or III-V materials.

Regards,

Joe Palmer

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