Alumina Wet Etch

From: Bahareh Behkam (bbehkam@andrew.cmu.edu)
Date: Tue Oct 22 2002 - 15:18:57 EDT

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I have 50 nm layer of alumina deposited on Si wafer and patterned. I want to
some how wet etch the Alumina layer. Does anybody know of any recipe for
this?

Thanks a lot
Bahar

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